| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02M7-445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02M7-533
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02M7-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02M7-533 |
| filingDate |
2000-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2011-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-4672941-B2 |
| titleOfInvention |
High frequency power supply for generating inductively coupled plasma |
| priorityDate |
1999-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |