http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3469885-B2

Outgoing Links

Predicate Object
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
filingDate 2001-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2003-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2003-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3469885-B2
titleOfInvention Transfer mask manufacturing method
priorityDate 2001-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411556313

Total number of triples: 14.