http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022085795-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_985f1bf0df4204078e687f8417dc5871 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2020-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fd0bf8a8a80a630fa0956375a59c048 |
| publicationDate | 2022-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2022085795-A |
| titleOfInvention | Board processing method and board processing equipment |
| abstract | PROBLEM TO BE SOLVED: To effectively remove a thin film (for example, a hard mask) formed on a substrate, minimize the residual process by-product in the processing space in the chamber, and obtain the process by-product remaining in the processing space in the chamber. Provided are a substrate processing method and a substrate processing apparatus capable of effectively discharging. The present invention provides a method for processing a substrate. In the method of treating a substrate, water and a treatment fluid containing alcohol are supplied to the treatment space of the chamber, plasma is generated from the treatment fluid, and a thin film containing boron formed on the substrate is removed. can do. [Selection diagram] FIG. 5 |
| priorityDate | 2020-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.