| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
1999-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3647303-B2 |
| titleOfInvention |
Plasma processing apparatus and processing method using the same |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008026712-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008026712-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7914692-B2 |
| priorityDate |
1998-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |