http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114038837-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0816f3adcc19d6c86fb30490ccb2497 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-293 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 2021-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_865b7e0c4a4920e46495b3551ef4b148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82dacff57e8d9a144e707e9d37598f0f |
| publicationDate | 2022-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114038837-A |
| titleOfInvention | Display device of thin film capacitor and manufacturing method of storage unit of display device |
| abstract | The invention discloses a display device of a thin film capacitor and a manufacturing method of a storage unit of the display device, and the display device of the thin film capacitor comprises a substrate, wherein a plurality of capacitor bodies are arranged on the upper surface of the substrate, insulating films are covered on the upper surfaces of the capacitor bodies, the insulating films are polyimide films, protective films are covered on the upper surfaces of the insulating films, the protective films are AR synthetic protective films, and a plurality of heat dissipation holes are formed in the surfaces of the protective films. According to the invention, the capacitor body is effectively insulated and protected by arranging the insulating film, electric leakage of the capacitor body is prevented, the toughness of the whole thin-film capacitor is improved by arranging the very thin protective film, and the etching pattern with higher precision can be obtained more efficiently by controlling the proportion of wet etching and plasma etching, so that the etching efficiency can be improved in the production process of the storage unit, the time consumption of the process is shortened, the etching precision is ensured, and the production efficiency of the storage unit is further improved. |
| priorityDate | 2021-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.