http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3141280-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-52 |
| filingDate | 1997-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3141280-B2 |
| titleOfInvention | Method for producing glassy carbon member for silicon wafer plasma processing |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014159696-A |
| priorityDate | 1997-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.