http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3134875-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 1988-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3134875-B2 |
| titleOfInvention | Plasma gas phase reactor |
| priorityDate | 1988-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66185 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733498 |
Total number of triples: 17.