| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01e5643206a54d132bb7a4745d8f5dad |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
1997-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a835dba57c7b65d7d8fc97cd8984f27d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43ed0b9b85fcd374fa46fe8922ba23c3 |
| publicationDate |
2001-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-425437-B |
| titleOfInvention |
Plasma processing system and protective member used for the same |
| abstract |
Disclosed is a protective member for a plasma processing system, which is disposed in a plasma processing chamber containing two plasma generating electrodes for forming a plasma region between the electrodes, on the side of each of the two electrodes in such a manner as to cover the plasma region, characterized in that at least a surface of the protective member on the plasma region side is formed of a glassy carbon material, whereby prolonging the service life of the protective member and suppressing the generation of dust from the electrodes. |
| priorityDate |
1996-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |