| abstract |
A cutting method comprises: forming a reformed area in a workpiece (1); and after forming the reformed area in the workpiece (1), cutting the workpiece (1) along an intended cutting line. When cutting the workpiece (1), a dry etching process is carried out from a front surface (3) to a rear surface (4) of the workpiece (1), while the workpiece (1) is attached to a carrier element at least under its own weight or by suction in order to form a groove on the front surface (3) in order to reach the rear surface (4) of the workpiece (1). |