| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-507 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2000-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_394cb04eaa6d5982241ac912d0baa9d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6159bc7c662ac5ef3d0ba01f3f65597
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25ae4dbfc29a244eb10f5205262ff30a |
| publicationDate |
2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1138055-B1 |
| titleOfInvention |
Semiconductor processing equipment having tiled ceramic liner |
| priorityDate |
1999-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |