| abstract |
A method of applying a multilayer anti-plasma coating on an article includes performing plating or ALD to form a conformal first anti-plasma layer on the article, wherein the conformal first anti-plasma layer is formed on a surface of the article And on the walls of the high aspect ratio features in the article. The conformal first anti-plasma coating has a porosity of about 0% and a thickness of about 200 nanometers to about 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition, or plasma spraying is subsequently performed to form a second anti-plasma layer, which The paste layer covers the conformal first anti-plasma layer at an area of the surface, but does not cover the conformal first anti-plasma layer at the wall of the aspect ratio feature. |