| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S156-915 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate |
2000-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_244f1e57f817030d41ab35e7d2444ace
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ee62887bd95a2fed56daf6539358ad9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee1ac460c125b7c08f5a5f7c22a6d517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fabc6b3566b56c90881e0ec1d5d72bbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf767f757d0773a74077372acfdf7164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8f12f8e3085bca61142e56986e9bf5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae689d332395211a9344d57a0a8579b |
| publicationDate |
2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1898444-B1 |
| titleOfInvention |
Plasma etching chamber |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I809318-B |
| priorityDate |
1999-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |