http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I236710-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3342 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2003-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d719ae81df84a3695a8e1a6bb255473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a812a2e19bd83ba721ca48c41680625 |
| publicationDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I236710-B |
| titleOfInvention | Plasma processing device, plasma processing method and semiconductor manufacturing device |
| abstract | The plasma processing device of the present invention comprises: a container to receive the processed substrate; an inlet opening to introduce hydrogen-containing gas into the container; a lower electrode to load the processed substrate in the container; an upper electrode to generate plasma in the container, and opposed to the lower electrode; a power source to apply voltage between the lower electrode and the upper electrode; and a metal oxide structure disposed in one portion of the container. The metal oxide structure is reduced when the hydrogen-containing gas is introduced. |
| priorityDate | 2002-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783 |
Total number of triples: 20.