| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3776322d3e097d0e69b241ffbfeba917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
1988-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db7feb394e8d9965019d47b9e939f071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_271b98fcdea7d5eb4a0eb0d96b538601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b81689ccbb8eaac032902bbc70300afa |
| publicationDate |
1997-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-970000418-B1 |
| titleOfInvention |
Dry etching method |
| abstract |
No content. |
| priorityDate |
1987-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |