http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009503882-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00547 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate | 2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009503882-A |
| titleOfInvention | Substrate processing method |
| abstract | The present invention is a method for treating a substrate, (A) a periodic process comprising an etching step using a reactive etching gas in a chamber and a deposition step for depositing a protective polymer on the sidewalls of the portion of the structure already etched by the preceding etching step. Using to etch a structure generally perpendicular to the substrate, and (b) in the absence of the substrate, cleaning the chamber in which the material has been deposited by performing the deposition step in step (a); Following cleaning of the material derived from the deposition, the chamber is cleaned by removing the material from the etchant gas by exposing the chamber to a plasma comprising a mixture of O 2 and at least an active element of the etchant gas. This is a substrate processing method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020137528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015018876-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020137527-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020129626-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7359159-B2 |
| priorityDate | 2005-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.