http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3808902-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
filingDate | 1997-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2006-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3808902-B2 |
titleOfInvention | Plasma etching method |
priorityDate | 1996-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.