| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50 |
| filingDate |
2009-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50ce64db11df64ac7fb3104c22d66ae1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c7a4901428d0c92efa76d0b9e575770
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5446180694ad105ea67bbbd323a6e560
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bccf8b97f90b57f1b75a32d698e626c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98150959ae1091e85fb3df9a63e5fa2a |
| publicationDate |
2010-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201005568-A |
| titleOfInvention |
Multi-layer/multi-input/multi-output (MLMIMO) models and method for using |
| abstract |
The invention provides a method of processing a substrate using multilayer processing sequences and Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models and libraries that can include one or more masking layer creation procedures, one or more pre-processing measurement procedures, one or more Partial-Etch (P-E) procedures, one or more Final-Etch (F-E) procedures, and one or more post-processing measurement procedures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I754195-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I783038-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I553728-B |
| priorityDate |
2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |