http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4758046-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
filingDate | 2000-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2011-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2011-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-4758046-B2 |
titleOfInvention | Plasma processing apparatus and antenna configuration for generating uniform process speed |
priorityDate | 1999-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.