patentipc/C23C16-505

http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505

Outgoing Links

Predicate	Object
title	using radio frequency discharges
label	C23C16/505
sameAs	http://www.wipo.int/classifications/ipc/ipcpub/?notion=scheme&symbol=C23C0016505000 http://data.epo.org/linked-data/def/ipc/C23C16-505
broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50

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