http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200308187-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a46126982937b2cc6b4f61f4cf417285 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4697 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4697 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-12 |
| filingDate | 2003-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0306fe8c9ab608d03a8b925d1af01012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c443b13fdfb23a5760fc926845b59e9d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e3fa0aded0e9d736db8f5dcff60c439 |
| publicationDate | 2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200308187-A |
| titleOfInvention | An atmospheric pressure plasma assembly |
| abstract | An atmospheric plasma generation assembly (100) having a body (17) containing a reactive agent introducing means, a process gas introducing means and one or more multiple parallel electrode arrangements adapted for generating a plasma. Each electrode arrangement having at least one partially dielectric coated electrode (3, 4) said assembly being adapted such that the only means of exit for a process gas and atomised liquid or solid reactive agent introduced into said assembly is through the plasma region (6) between the aforementioned electrodes (3, 4). The assembly is adapted to move relative to a substrate (1) substantially adjacent to the aforementioned electrodes outermost tips (23). The assembly may also comprise an extractor unit surrounding the plasma generating assembly, comprising an extractor body (8) which is adapted to isolate the assembly from external atmosphere and provide a means of removing exhaust process gas, reactive agents and by-products. |
| priorityDate | 2002-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.