http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000156372-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1998-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfbfdd9816d6131f0326502828c91f0a |
| publicationDate | 2000-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000156372-A |
| titleOfInvention | Plasma processing equipment |
| abstract | (57) Abstract: Provided is a plasma processing apparatus capable of forming a film having a uniform film quality and thickness even on a substrate having a large area such as a substrate for a liquid crystal display panel. A load lock chamber, a plasma chamber, and a process chamber each having a vacuum maintained therein. The load lock chamber 1 is provided with an exhaust port 4, and the process chamber 3 is provided with a heater 5 for heating the substrate 13, a stage 6 for transporting the substrate 13, and an exhaust port 7. The plasma chamber 2 includes a quartz glass window 8 for introducing high-frequency power for plasma generation, a resonator 9 for coupling high-frequency power to plasma, a gas inlet 10 for plasma generation, and a process gas inlet 11. Provided. Further, a plate 12 provided with mesh or slit-shaped holes is attached to the plasma chamber 2. The plate 12 is detachable, and the opening shape, the opening ratio, or the thickness of the plate 12 can be changed. |
| priorityDate | 1998-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.