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filingDate 2020-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2020163115-A1
titleOfInvention Substrate processing tool capable of modulating one or more plasma temporally and/or spatially
abstract A plasma tool in which the generation of two or more plasmas in a processing chamber used for processing a substrate is modulated either temporally, spatially, or both. The modulation of the two plasmas is used for the formation of Diamond Like Carbon (DLC) layers on substrates. One plasma is used for forming an amorphous carbon layer, while the second plasma is used for converting the amorphous carbon layer to a DLC by ion bombardment.
priorityDate 2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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