patentcpc/H01J37-3405

http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405

Outgoing Links

Predicate	Object
concordantIPC	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
level	11^^<http://www.w3.org/2001/XMLSchema#integer>
symbol	H01J37/3405
modified	2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
title	Magnetron sputtering
type	http://data.epo.org/linked-data/def/cpc/SubGroup
broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3402

Incoming Links

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