| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5829e9bf67ef76ac50de2742edc35969 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-544 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32614
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32917
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3478
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3471 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-46 |
| filingDate |
2013-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1462225329c01dbd7512c279473a9030
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e267098bb44cddff7a8aa3123ae9f23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c17dfd16e9409bd385344737986ea2df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78fb332230cd9873b10e1c1c51fa54e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b8e54d349fbbdd8a0f490834f41a2e |
| publicationDate |
2014-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2826917-A1 |
| titleOfInvention |
Remote arc discharge plasma assisted processes |
| abstract |
A coating system includes a vacuum chamber and a coating assembly positioned within the vacuum chamber. The coating assembly includes a vapor source that provides material to be coated onto a substrate, a substrate holder to hold substrates to be coated such that the substrates are positioned in front of the vapor source, a cathode chamber assembly, and a remote anode. The cathode chamber assembly includes a cathode, an optional primary anode and a shield which isolates the cathode from the vacuum chamber. The shield defines openings for transmitting an electron emission current from the cathode into the vacuum chamber. The vapor source is positioned between the cathode and the remote anode while the remote anode is coupled to the cathode. The coating system also includes a primary power supply connected between the cathode and the primary anode and a secondary power supply connected between the cathode chamber assembly and the remote anode. A method using the coating system is also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020110055-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111634892-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111634892-B |
| priorityDate |
2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |