Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f33b6c0214cab434044a76eb4851578f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51ea83920fa687e50007860670ffd5ef |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-103 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-06 |
filingDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2e010ba1cb0d0b679729400784993a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b14492c9576c0cbb3176008477240e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ded620bb29435631fd899bd632bce4d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b489ebe1b6704b150bcbd255a7b22af2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_935e8c57e2fbf38ebfe96ad326d5ef09 |
publicationDate |
2009-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2009065741-A1 |
titleOfInvention |
Apparatus and method for the application of a material layer to display devices |
abstract |
The invention relates to a method and apparatus for the application of material to form a layer of an organic electroluminescent device. The material is sputter deposited typically from at least one target of material held in respect to a magnetron in a coating chamber. The magnetrons used can be unbalanced magnetrons and/or are provided with other magnetrons and/or magnet arrays in a closed field configuration. The material is found to be deposited in a manner which prevents or minimises damage to the device and hence reduces or removes the need for a barrier layer to be applied. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8420156-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010242578-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011171397-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8491957-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9299957-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009305062-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9803276-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2549521-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014520966-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015522715-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013011149-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011227055-A1 |
priorityDate |
2005-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |