| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-332 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2011-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013539498-A |
| titleOfInvention |
Coating device with HIPIMS power supply |
| abstract |
PROBLEM TO BE SOLVED: To provide a coating apparatus provided with a HIPIMS power source. A coating apparatus including a vacuum vessel, a plurality of cathodes disposed therein, and a HIPIMS power source, and at least one coating cathode operated by the HIPIMS power source, as compared with the coating cathode. A plurality of smaller etching cathodes are provided. The etching cathode is connected to the HIPIMS power supply in a predetermined or predeterminable sequence. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017021907-A |
| priorityDate |
2010-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |