http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201114935-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3497 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3435 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abaa9e8d2cabff8352bdb6d99543e0d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3756e8b00d7de66e108fd048d54f467a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8a81912dd12c73876da3ac47a505b35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3617b64ecd323f52765e0414e523b92f |
| publicationDate | 2011-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201114935-A |
| titleOfInvention | Sputtering system, rotatable cylindrical target assembly, backing tube, target element and cooling shield |
| abstract | The application concerns a target backing tube for a rotatable cylindrical target assembly comprising: a tube for at least one target element to be disposed there around, wherein the tube has an exterior surface adapted to face the at least one target element, wherein a portion of the exterior surface of the tube has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the exterior surface of the tube. Further, the application concerns a cooling shield for a sputtering system comprising a rotatable target, the cooling shield has an interior surface adapted to face a target element of a sputtering system and an exterior surface; wherein a portion of the interior surface of the cooling shield has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the interior surface of the cooling shield. Additionally, the application concerns a target element for a rotatable cylindrical target assembly of a sputtering system, wherein the target element has an interior surface adapted to face a target backing tube onto which the target cylinder is adapted to be disposed and exterior surface, wherein a portion of the interior surface of the target element has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the interior surface of the target element. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I619561-B |
| priorityDate | 2009-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.