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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96a4cb2caf2b8e9f33981fcb7f17a311
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publicationDate 2010-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2010127845-A1
titleOfInvention Method for the production of oxide and nitride coatings and its use
abstract The present invention relates to a method for the enhanced production of insulating layers by High Power Impulse Magnetron Sputtering (HiPIMS) or High Power Pulsed Magnetron Sputtering (HPPMS). This method is preferably used for the production of oxynitride layers with variable amounts of oxide and nitride, preferably based on silicon and aluminium.
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