http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011017583-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32faff8392335d89bdad5aeccfa9070b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-543 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate | 2011-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c5b63de9b7e231a9d906add4c662d89 |
| publicationDate | 2012-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102011017583-A1 |
| titleOfInvention | Method for determining process-significant data of a vacuum deposition process |
| abstract | The invention relates to a method for determining process-significant data of a vacuum deposition process, in which a substrate is coated in a vacuum chamber by means of a material dissolved out from a target connected to a magnetron, wherein an optical emission spectrum is recorded and from this process-significant data of the vacuum deposition process for further processing in measurement - or control processes are determined, the task is based on minimizing errors in the determination of process-significant data. This is achieved by determining from at least two process materials at least three intensities I 1 ... I 3 of spectral lines from the optical emission spectrum. From these, single and multiple intensities are mathematically linked with each other and from the results of the combination via a further mathematical link a process-significant date is determined, which is used in subsequent measurement or control processes. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020124936-A1 |
| priorityDate | 2011-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.