| abstract |
INDUSTRIAL APPLICABILITY The fluorine-based polymer composite target for sputtering according to the present invention has excellent bonding strength with a metal electrode to which a voltage is applied, suppresses occurrence of warpage, and provides conductivity so that it can be stably applied to DC and MF power systems widely used in industry It is possible to provide a fluorine-based polymer composite target capable of forming a plasma and effectively depositing a fluorine-based polymer on an adherend by sputtering. |