http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170102858-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9305fc720f87097494d965f1b1310e24
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14
filingDate 2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63e21bee593e95fe67ef0fa30d764b7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50985305a712607fc651f9395faa04dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_537e370c01fa33b55c3cf310e0a3ced6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b40f66acc6b7a7cc05ef9ce7b885e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41cadc9f1b3e0b08580fba7df9eecc5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18ab64bc58db45a9ff7d78d2ef58a071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2851a29be1e1306ca913ff5f968ab7cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4db01d50449cb067190afebe1ec616ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9ef7ab0dfdbf3b092ecc475a7ebd113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dacf78051a28af7b86966795000ad9fd
publicationDate 2017-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170102858-A
titleOfInvention Fluoropolymer composite target for deposition
abstract The fluorine-based polymer composite target for RF sputtering according to the present invention has excellent bonding strength to a metal electrode to which a voltage is applied, suppresses the occurrence of warpage, provides improved conductivity by imparting conductivity, and prevents dielectric breakdown of a fluorinated polymer And an excellent deposition rate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210000473-A
priorityDate 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452055648
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6339
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57452119
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449220908
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82236
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449457083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517738
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407832258
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160118789
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407774248
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451627680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454108060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451572542

Total number of triples: 65.