| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2010-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef18f8fc55d43fe33c97c5579e2b0be3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab65ca73a0d28006539ecf59a8f65453 |
| publicationDate |
2011-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011117078-A |
| titleOfInvention |
Non-adhesive rotating target for sputtering |
| abstract |
An improved target assembly is provided for replacement and reduced performance due to target assembly damage resulting in significant cost increases. A rotating target for sputtering includes a target backing tube having an outer surface, a backing layer that is in contact with the outer surface of the target backing tube and is electrically conductive and non-thermally conductive, and a target backing. A plurality of target cylinders located around the tube 205 and in contact with the backing layer. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015036448-A |
| priorityDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |