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publicationDate 2016-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160092947-A
titleOfInvention Fluoropolymer composite target for deposition
abstract The fluorine-based polymer composite target for RF sputtering according to the present invention has excellent bonding strength to a metal electrode to which a voltage is applied, suppresses the occurrence of warpage, provides improved conductivity by imparting conductivity, and prevents dielectric breakdown of a fluorinated polymer And an excellent deposition rate.
priorityDate 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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