http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102934197-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate | 2011-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102934197-B |
| titleOfInvention | Be used to form the system and method for sputter material layer |
| abstract | The disclosure has been described the method for a kind of coated substrate (110), and described method is included in the upper step that forms sputter material layer (806) of substrate (110). The step that forms sputter material layer can comprise the following steps: will sputter at from the material of at least one rotatable target (120 ') on substrate (110); And change the relative position between at least one rotatable target (120 ') and substrate (110). In addition, the disclosure has been described and during sputtering technology, has been changed target (120; 120 '; 120 " distance) and between substrate. The disclosure has also been described the system for coated substrate. |
| priorityDate | 2010-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ61716 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450968440 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16727373 |
Total number of triples: 18.