| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3421
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3497
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate |
2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2015-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5650315-B2 |
| titleOfInvention |
Apparatus for coating substrates in a vacuum chamber by plasma enhanced chemical vapor deposition |
| priorityDate |
2010-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |