http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10861685-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9305fc720f87097494d965f1b1310e24
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-124
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
filingDate 2016-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9ef7ab0dfdbf3b092ecc475a7ebd113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b40f66acc6b7a7cc05ef9ce7b885e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2851a29be1e1306ca913ff5f968ab7cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18ab64bc58db45a9ff7d78d2ef58a071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4db01d50449cb067190afebe1ec616ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63e21bee593e95fe67ef0fa30d764b7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_537e370c01fa33b55c3cf310e0a3ced6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dacf78051a28af7b86966795000ad9fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50985305a712607fc651f9395faa04dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41cadc9f1b3e0b08580fba7df9eecc5d
publicationDate 2020-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10861685-B2
titleOfInvention Fluoro-based polymer composite target for sputtering
abstract The fluoro-based polymer composite target for sputtering according to the present invention is excellent in adhesion with a metal electrode to which a voltage is applied, can prevent bending, and is capable of stably forming plasma by imparting conductivity even with industrially widely used DC and MF power supply systems, thereby allowing a fluorinated polymer to be effectively deposited on an adherend by sputtering.
priorityDate 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6149778-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0532810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4629547-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150007865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100120598-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101016622-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110108178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120047873-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009045051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05215905-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009175500-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159996
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448148497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449457083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407832258
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407774248
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452055648
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280508
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424505117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297

Total number of triples: 67.