| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate |
2017-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110168130-B |
| titleOfInvention |
Film forming method and roll-to-roll film forming apparatus |
| abstract |
The present invention provides a film forming method and a roll-to-roll film forming apparatus. A film forming method according to one embodiment of the present invention includes a pretreatment of evacuating the vacuum container until the water pressure in the vacuum container becomes equal to or less than a target value. Plasma is generated by applying an alternating voltage between the first chromium target and the second chromium target arranged in the vacuum vessel. A chromium layer is formed on the film-forming surface of the flexible substrate arranged to face the first chromium target and the second chromium target. The present invention can suppress deformation of the flexible substrate. |
| priorityDate |
2017-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |