| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3323 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate |
2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7336aa4b642f23bfe109f0d84e4fae1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_569ed710566f95fb4f3561feb1891d7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90db3cc8a8f4fedbfea758202e772df0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da3e003a66c3be623a0188e8f00786be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01239d0a79ae0d90b365f5977cab467f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbe6d4aeb68a518f0a7ef29b2a21c920 |
| publicationDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I553141-B |
| titleOfInvention |
Method of treating a substrate in a physical vapor deposition (PVD) chamber and forming a tungsten-containing layer on top of the substrate |
| priorityDate |
2010-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |