http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114774867-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate | 2021-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcdc3fa9868479fe7f8675f49fc9fb70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70036d0c90dcbe5342c29fed4b74e24d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c0f287c6da6b409d04b27f5b095420d |
| publicationDate | 2022-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-114774867-A |
| titleOfInvention | Processing chamber and substrate processing method |
| abstract | A processing chamber and a substrate processing method, the processing chamber includes a ground screen and a cover ring. The ground screen includes an annular body and at least one guide pin extending from the annular body. A cover ring is located on the ground screen, the cover ring includes an annular body including at least one recess. At least a portion of the at least one guide pin is received in the at least one recess, an inner cylindrical ring extends from the annular body, and an outer cylindrical ring extends from the annular body and is radially spaced from the inner cylindrical ring by a horizontally extending portion of the annular body. |
| priorityDate | 2021-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.