| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13aa7b32ae00ed83af7dfaa0b6a1f7c2 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 |
| filingDate |
2001-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43741cde7c1eee89e52ea600815a1166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1cbf5580ac369302c4603df6dee9da1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab70ea1b8333eadef5322010c7781e0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f9d721d474071bfc54859291a882072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd2cc237e35cb016f9a07f46214e50c |
| publicationDate |
2003-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003003266-A |
| titleOfInvention |
Atmospheric-pressure plasma processing apparatus, atmospheric-pressure plasma processing method, substrate, optical film, and image display device |
| abstract |
(57) [Abstract] [Problem] A film that does not cause aging on a substrate, a dense film, Provided is an atmospheric pressure plasma processing apparatus for forming a film having a strong adhesive force. SOLUTION: Under an atmospheric pressure or a pressure close to the atmospheric pressure, a base material is positioned between electrodes facing each other, and a high-frequency voltage is applied in the presence of a gas containing a reactant gas and an inert gas to discharge plasma. In the atmospheric pressure plasma processing apparatus for performing the surface treatment of the substrate, An atmospheric pressure plasma processing apparatus comprising: a gas inlet for supplying the gas between the opposed electrodes; and changing a reactive gas content of the gas supplied from the gas inlet. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007059305-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008130503-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4597756-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4577155-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4837028-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006129656-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006303265-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008534731-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101472736-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008075493-A1 |
| priorityDate |
2001-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |