| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2004-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d86ea2cd9926e87a109f69cc41d0c009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c470bc4538dde1f53f48be9d2b6ea979
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3caf4949343cc927db9d5c9ee5f8a5cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f37ca68e462b2aa83c86e43b2fc08d1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a393b4273ac4f1e4bb94be49e1c6d31c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6fcf7f8a09f6efeffd419b84e13a4f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56198e10fe7ce5a79c597bdca7b8a5a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dd97a2850f4af9521a64a4b9ef672b8 |
| publicationDate |
2008-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I293997-B |
| titleOfInvention |
Methods of reducing plasma-induced damage for advanced plasma cvd dielectics |
| priorityDate |
2003-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |