http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106132691-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
| filingDate | 2015-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106132691-B |
| titleOfInvention | The manufacturing method of gas barrier film and gas barrier film |
| abstract | The present invention relates to the manufacturing methods of a kind of gas barrier film and gas barrier film.The gas barrier film of the present invention is the gas barrier film comprising base material film and inorganic layer, wherein, inorganic layer contains Si, N, H and O, in film thickness direction central portion, with the homogeneous area for being more than ratio of the film thickness of 5nm comprising Si, N, H and O uniformly and the ratio of O is relatively low, the region with the interfacial contact more than any one is by O ratio：The O ratio that (sum of quantity/Si, N and O of O) × 100% represents increases from the lateral interface direction of homogeneous area, and the oxygen-containing region that the variable quantity of the per unit film thickness of O ratio is 2%/nm~8%/nm.The manufacturing method of gas barrier film is included forms inorganic layer by plasma CVD method, and supplies comprising adjustment to be used to form the power of plasma and reach the maximum value of the time of maximum value and power from supply high frequency rate from 0kW and reach time of 0kW. |
| priorityDate | 2014-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.