| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7c55d6210799524a05eea132c79321e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e93a2d0ab9ddc3202c3a3815f261261 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-844 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2004-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2df78ea520fc48e072017a966ef88288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef5c90a21c6a75f8121075e03475f705 |
| publicationDate |
2005-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005238816-A1 |
| titleOfInvention |
Method and apparatus of depositing low temperature inorganic films on plastic substrates |
| abstract |
A method and apparatus for depositing a low temperature inorganic film onto large area plastic substrates are described in this invention. Low temperature (<80° C.) inorganic films do not adhere very well to the plastic substrate. Therefore, a low temperature (<80° C.) plasma pre-treatment is added to improve the adhesion property. The inorganic film with plasma pre-treatment shows good adhesion and hermetic properties. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008308042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009011611-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006110840-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017250370-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8680766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015255750-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009115325-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008176364-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019016266-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7291515-B2 |
| priorityDate |
2004-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |