| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2010-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_081f9ee0e1f0d414ce03e1de08844875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eee14016755ed38cedb16939694a43e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f4a20d53086bc64c4fb82b009f4b1f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7df26769d8a879ee9065224f42c366b |
| publicationDate |
2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2010114471-A |
| titleOfInvention |
Method and apparatus for reducing arc during plasma processing |
| abstract |
An improved method and apparatus is provided for reducing arcing during plasma processing. In a first aspect, a method for use during plasma processing is provided. The first method includes: (1) placing a substrate on a substrate holder in a plasma chamber; (2) positioning a cover frame below near the periphery of the substrate; (3) plasma using the cover frame. Reducing arcs during plasma processing in the chamber. Numerous other aspects are provided. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009230636-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013161839-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8336891-B2 |
| priorityDate |
2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |