| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b79cb5531d4fdaad48e10572558bbafd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdd94f212dc7aef02fc1dcf28fa9b4fd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate |
2009-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_907165893c3db203aa1510de7babda5b |
| publicationDate |
2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009104579-A1 |
| titleOfInvention |
Plasma discharge device and thin film laminate |
| abstract |
Provided are a plasma discharge device that forms thin films of excellent film thickness uniformity and thin film layered products. The plasma discharge device is characterized by the fact that in a plasma discharge device having opposing electrodes consisting of a pair of rotating roll electrodes, a plasma discharge space wherein voltage is applied between the opposing electrodes to generate a plasma discharge, a substrate that passes through the plasma discharge space while being held by said opposing electrodes that consist of roll electrodes, and a process gas supply means that supplies process gas into said plasma discharge space, said process gas is composed of a discharge gas and a thin film-forming gas, said discharge gas contains at least 90 vol% or more of nitrogen gas, and the ratio of the diameters of the above pair of roll electrodes that constitute said opposing electrodes is 1.00:0.55 to 1.00:0.95. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113710358-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9255330-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113710358-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012004175-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020208152-A1 |
| priorityDate |
2008-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |