http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3548335-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
| filingDate | 1996-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3548335-B2 |
| titleOfInvention | Deposited film forming apparatus and deposited film forming method |
| priorityDate | 1996-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.