| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8baf15b7cdd9d9820671b0a4684d281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e51d725162a6e6d4be92cf950dfeb32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9544d753476d02907057c19cdf34f457 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
| filingDate |
2011-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b76d8cc4b37a908ff50f7ec92cae23b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddf0534e34ed2ba15c7e82f103e29041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78fe4a8f5e67fc26238838271849a1b4 |
| publicationDate |
2013-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013015053-A1 |
| titleOfInvention |
Inductively coupled rf plasma source with magnetic confinement and faraday shielding |
| abstract |
Disclosed is an inductively coupled RF plasma source that provides both magnetic confinement to reduce plasma losses and Faraday shielding to suppress parasitic capacitive components. The inductively coupled RF plasma system comprises an RF power source, plasma chamber, an array of permanent magnets, and an antenna array. The plasma chamber is comprised of walls and a dielectric window having an inner and outer surface wherein the inner surface forms a wall of the plasma chamber. The array of parallel conductive permanent magnets is electrically interconnected and embedded within the dielectric window walls proximate to the inner surface and coupled to ground on one end. The permanent magnet array elements are alternately magnetized toward and away from plasma in the plasma chamber to form a multi-cusp magnetic field. The antenna array may be comprised of parallel tubes through which an RF current is circulated. The antenna array is oriented perpendicular to the permanent magnet array. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11791126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11489847-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11535555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9487441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10116035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108291089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9975805-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9586861-B2 |
| priorityDate |
2011-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |