http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BR-102012002818-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14621 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14641 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate | 2012-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b177f338ded7d04b399ba14c47112880 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d68351ab94e47d0fb9cc6d55d0cf72d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1639c75023d6b355baceb2435e9e7dd1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3791b10989f033fba6ad6f662c10702 |
| publicationDate | 2013-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | BR-102012002818-A2 |
| titleOfInvention | Method for manufacturing a solid state image capture device and solid state image capture device |
| abstract | METHOD FOR MANUFACTING A SOLID STATE IMAGE CAPTURE DEVICE AND SOLID STATE IMAGE CAPTURE DEVICE. A method for fabricating a solid state imaging device comprising a substrate including a photoelectric conversion unit and a waveguide arranged on the substrate, and a waveguide corresponding to the photoelectric conversion unit and including a core and a particle is described. coating, which includes a first step and a second step, wherein in the first step and the second step an element to be formed in the core is formed in an opening in the coating by high density plasma enhanced chemical vapor deposition in the which, after the first stage, in the second stage, the element to be formed in the core is formed by the chemical deposition of high density plasma enhanced steam under conditions in which the ratio of the radiofrequency power on the rear side of the substrate to the Radio frequency power on the face side of the substrate is higher than in the first stage. |
| priorityDate | 2011-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.