http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004062553-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e52e7ad9df6ef99419f4da0ed11ee7f4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 |
| filingDate | 2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5109d6e8e297f53e2c5172a296678bc4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99bc0dc91c688f41d3200299f2e3bda6 |
| publicationDate | 2006-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102004062553-A1 |
| titleOfInvention | CVD reactor with RF heated process chamber |
| abstract | ThenThe invention relates to a device for separating in particularncrystalline layers on at least one particular crystallinenSubstrate, with one of several wall parts (1, 2, 3, 4) formednProcess chamber (5), which wall parts (1, 2, 3, 4) electricallynare conductive and forming contact contacts (2 ', 2' ', 3',n3 ''),nwith a process chamber wall parts (1, 2, 3, 4) receiving,nconsisting of an electrically non-conductive material reactor housing (6)nand an RF heating coil surrounding the process chamber wall parts (1, 2, 3, 4).nIt is essential between the reactor housing (6) and the process chamber walln(1, 2, 3, 4) arranged, one-piecenand massive screen heating tube (8) whose material is so electricallynconductive is that of the one generated by the RF coilnRF field there is induced eddy currents that heats the RF field innto a considerable extentnand the process chamber wallsn(1, 2, 3, 4) heats up. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014114549-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014100092-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016101003-A1 |
| priorityDate | 2004-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.