http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001115265-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G5-082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1999-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87d2143c0ec81fd7bf3714aa78a28386 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8298680bf7fc3f0063af2f45131c3b5 |
| publicationDate | 2001-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001115265-A |
| titleOfInvention | High frequency plasma CVD method and high frequency plasma CVD apparatus |
| abstract | (57) [Problem] To efficiently and stably form a high-quality deposited film having an extremely uniform film thickness and a uniform film quality on a large-sized substrate having an arbitrary shape at a high speed. To provide a high-frequency plasma CVD method and a high-frequency plasma CVD apparatus that can be used. A high-frequency plasma CVD method for decomposing a source gas introduced into a reaction vessel to form a deposited film on the substrate to be film-formed, wherein the plasma generating high-frequency electrode has three or more high-frequency electrodes When adjusting the phase of the reflected power at the tip portions on the opposite side of the feed points of these high-frequency electrodes, the positions of the antinodes of the standing waves of each of the three or more high-frequency electrodes are positioned at high frequencies. 1 of power wavelength λ In the range of / 6λ ± 1 / 16λ, the deposited film is formed so as to be continuously shifted from one high-frequency electrode to the next high-frequency electrode successively. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015084317-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312054-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005211865-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011233844-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007323864-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102149247-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009123513-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015125493-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015125493-A1 |
| priorityDate | 1999-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.